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Module code: MST408 |
2V+1PA (3 hours per week) |
3 |
Semester: 4 |
Mandatory course: yes |
Language of instruction:
German |
Assessment:
Written exam, project work
[updated 06.08.2012]
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MST408 Mechatronics and Sensor Technology, Bachelor, ASPO 01.10.2005
, semester 4, mandatory course
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45 class hours (= 33.75 clock hours) over a 15-week period. The total student study time is 90 hours (equivalent to 3 ECTS credits). There are therefore 56.25 hours available for class preparation and follow-up work and exam preparation.
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Recommended prerequisites (modules):
MST101 Mechanics, Electricity, Optics MST303 Materials Science
[updated 06.08.2012]
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Recommended as prerequisite for:
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Module coordinator:
Prof. Dr. Günter Schultes |
Lecturer: Prof. Dr. Günter Schultes
[updated 01.10.2005]
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Learning outcomes:
This course introduces students to the field of microfabrication technologies. Students will learn the requirements, conditions and scope of microfabrication, and will acquire an understanding of the key technologies in this field.
[updated 06.08.2012]
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Module content:
Introduction to and definition of microfabrication technologies 2. Materials and substrate production 3. Vacuum technology: the need for a vacuum, key parameters, generating and measuring vacuums 4. Thin- and thick-film technologies 4.1 Thin-film deposition techniques (PVD, CVD) 4.2 Thermal oxidation 4.3 Thick-film deposition techniques 5. Structuring techniques 6. Micromechanics and microsystems technology 7. Moulding techniques and electroplating, the LIGA process 8. Measuring and analytical methods in microfabrication 9. Requisite infrastructure and investments, and potential opportunities for service providers
[updated 06.08.2012]
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Teaching methods/Media:
Lectures and project work
[updated 06.08.2012]
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Recommended or required reading:
- Grundlagen der Vakuumtechnik, Fa. Leybold Köln Eigenverlag, 1997 - F. Völkllein, T. Zetterer; Einführung in die Mikrosystemtechnik, Vieweg Verlag - W. Menz, J. Mohr, Mikrosystemtechnik für Ingenieure, Wiley-VCH 1997 - G. Gerlach, W. Dötzel, Grundlagen der Mikrosystemtechnik, Hanser Verlag 1997 - U. Mescheder, Mikrosystemtechnik, Teubner Verlag 2000 - W.-J. Fischer, Mikrosystemtechnik, Vogel Fachbuch, 2000 - Beschichten mit Hartstoffen, VDI-Verlag 1992 - W. Krause, Fertigung in der Feinwerk- und Mikrotechnik, C. Hanser Verlag 1995 - H. Schaumburg, Werkstoffe, Teubner Verlag 1990 - H. Eigler, W. Beyer, Moderne Produktionsprozesse der Elektrotechnik, Elektronik und Mikrosystemtechnik, Expert Verlag 1996 - M. Madou, Fundamentals of Microfabrication, CRC-Press, 1997 - Mohamed Gad-el-Hak, The MEMS Handbook, CRC Press, 2002
[updated 06.08.2012]
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