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Microfabrication

Module name (EN):
Name of module in study programme. It should be precise and clear.
Microfabrication
Degree programme:
Study Programme with validity of corresponding study regulations containing this module.
Mechatronics and Sensor Technology, Bachelor, ASPO 01.10.2005
Module code: MST408
Hours per semester week / Teaching method:
The count of hours per week is a combination of lecture (V for German Vorlesung), exercise (U for Übung), practice (P) oder project (PA). For example a course of the form 2V+2U has 2 hours of lecture and 2 hours of exercise per week.
2V+1PA (3 hours per week)
ECTS credits:
European Credit Transfer System. Points for successful completion of a course. Each ECTS point represents a workload of 30 hours.
3
Semester: 4
Mandatory course: yes
Language of instruction:
German
Assessment:
Written exam, project work

[updated 06.08.2012]
Applicability / Curricular relevance:
All study programs (with year of the version of study regulations) containing the course.

MST408 Mechatronics and Sensor Technology, Bachelor, ASPO 01.10.2005 , semester 4, mandatory course
Workload:
Workload of student for successfully completing the course. Each ECTS credit represents 30 working hours. These are the combined effort of face-to-face time, post-processing the subject of the lecture, exercises and preparation for the exam.

The total workload is distributed on the semester (01.04.-30.09. during the summer term, 01.10.-31.03. during the winter term).
45 class hours (= 33.75 clock hours) over a 15-week period.
The total student study time is 90 hours (equivalent to 3 ECTS credits).
There are therefore 56.25 hours available for class preparation and follow-up work and exam preparation.
Recommended prerequisites (modules):
MST101 Mechanics, Electricity, Optics
MST303 Materials Science


[updated 06.08.2012]
Recommended as prerequisite for:
Module coordinator:
Prof. Dr. Günter Schultes
Lecturer: Prof. Dr. Günter Schultes

[updated 01.10.2005]
Learning outcomes:
This course introduces students to the field of microfabrication technologies. Students will learn the requirements, conditions and scope of microfabrication, and will acquire an understanding of the key technologies in this field.  

[updated 06.08.2012]
Module content:
Introduction to and definition of microfabrication technologies
2.        Materials and substrate production
3.        Vacuum technology: the need for a vacuum, key parameters, generating and measuring vacuums
4.        Thin- and thick-film technologies
4.1        Thin-film deposition techniques (PVD, CVD)
4.2        Thermal oxidation
4.3        Thick-film deposition techniques
5.        Structuring techniques
6.        Micromechanics and microsystems technology
7.        Moulding techniques and electroplating, the LIGA process
8.        Measuring and analytical methods in microfabrication
9.        Requisite infrastructure and investments, and potential opportunities for service providers

[updated 06.08.2012]
Teaching methods/Media:
Lectures and project work

[updated 06.08.2012]
Recommended or required reading:
- Grundlagen der Vakuumtechnik, Fa. Leybold Köln Eigenverlag, 1997
- F. Völkllein, T. Zetterer; Einführung in die Mikrosystemtechnik, Vieweg Verlag
- W. Menz, J. Mohr, Mikrosystemtechnik für Ingenieure, Wiley-VCH 1997
- G. Gerlach, W. Dötzel, Grundlagen der Mikrosystemtechnik, Hanser Verlag 1997
- U. Mescheder, Mikrosystemtechnik, Teubner Verlag 2000
- W.-J. Fischer, Mikrosystemtechnik, Vogel Fachbuch, 2000
- Beschichten mit Hartstoffen, VDI-Verlag 1992
- W. Krause, Fertigung in der Feinwerk- und Mikrotechnik, C. Hanser Verlag 1995
- H. Schaumburg, Werkstoffe, Teubner Verlag 1990
- H. Eigler, W. Beyer, Moderne Produktionsprozesse der Elektrotechnik,  
  Elektronik und Mikrosystemtechnik, Expert Verlag 1996
- M. Madou, Fundamentals of Microfabrication, CRC-Press, 1997
- Mohamed Gad-el-Hak, The MEMS Handbook, CRC Press, 2002

[updated 06.08.2012]
[Thu Mar 28 14:10:00 CET 2024, CKEY=mitech, BKEY=mst, CID=MST408, LANGUAGE=en, DATE=28.03.2024]